Plasma Proc:Principles & Appl
CHEE 7387
Credit Hours: 3.0
Lecture Contact Hours: 3 Lab Contact Hours: 0
Prerequisite: graduate standing in engineering or natural sciences or consent of instructor.
Principles of low pressure glow discharge plasmas: plasma generation and maintenance, plasma chemistry, plasma diagnostics. Applications with emphasis on semiconductor manufacturing.
Lecture Contact Hours: 3 Lab Contact Hours: 0
Prerequisite: graduate standing in engineering or natural sciences or consent of instructor.
Principles of low pressure glow discharge plasmas: plasma generation and maintenance, plasma chemistry, plasma diagnostics. Applications with emphasis on semiconductor manufacturing.
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